ASML employees working as Controls Engineer in US have attributed a compensation and benefits rating of 4 out of 5 stars, based on 5 ratings. This is in line with the average of Controls Engineer professionals at ASML worldwide.
The salary trajectory of a Controls Engineer ranges between locations and employers. The salary starts at $117,404 per year (estimate) and goes up to $207,621 per year (estimate) for the highest level of seniority.
The estimated average salary for a Controls Engineer at ASML is $128,417 per year or $62 per hour, but some professionals have reported earning up to roughly $188,601 per year (90th percentile). The typical pay range is between $105,748 (25th percentile) and $157,528 (75th percentile) annually. This is based on 11 salaries submitted by ASML Controls Engineer professionals on Glassdoor, as of Jun 2026.
Controls Engineer professionals typically earn between $51 and $76 per hour.
Controls Engineer professionals typically earn between $8,812 and $13,127 monthly.