Recent salaries shared by Field Service Engineer at ASML
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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ASML pay FAQs
- The average salary for Field Service Engineer is $104,151 per year (estimate) in US, which is 1% lower than the average ASML salary of $105,695 per year (estimate) for this job.
- ASML employees working as Field Service Engineer in US have attributed a compensation and benefits rating of 4.2 out of 5 stars, based on 14 ratings. This is 14% higher than the average of Field Service Engineer professionals at ASML worldwide.
- The salary trajectory of a Field Service Engineer ranges between locations and employers. The salary starts at $104,144 per year (estimate) and goes up to $213,954 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Field Service Engineer at ASML is $104,151 per year or $50 per hour, but some professionals have reported earning up to roughly $146,552 per year (90th percentile). The typical pay range is between $88,094 (25th percentile) and $124,874 (75th percentile) annually. This is based on 35 salaries submitted by ASML Field Service Engineer professionals on Glassdoor, as of Jun 2026.
- Field Service Engineer professionals typically earn between $42 and $60 per hour.
- Field Service Engineer professionals typically earn between $7,341 and $10,406 monthly.