Recent salaries shared by Senior Software Design Engineer at ASML
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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ASML pay FAQs
- The average salary for Senior Software Design Engineer is $217,903 per year (estimate) in US, which is 10% higher than the average ASML salary of $198,567 per year (estimate) for this job.
- ASML employees working as Senior Software Design Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 2 ratings. This is in line with the average of Senior Software Design Engineer professionals at ASML worldwide.
- The salary trajectory of a Senior Software Design Engineer ranges between locations and employers. The salary starts at $152,758 per year (estimate) and goes up to $384,590 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Senior Software Design Engineer at ASML is $217,903 per year or $105 per hour, but some professionals have reported earning up to roughly $323,388 per year (90th percentile). The typical pay range is between $179,336 (25th percentile) and $269,056 (75th percentile) annually. This is based on 9 salaries submitted by ASML Senior Software Design Engineer professionals on Glassdoor, as of Jun 2026.
- Senior Software Design Engineer professionals typically earn between $86 and $129 per hour.
- Senior Software Design Engineer professionals typically earn between $14,945 and $22,421 monthly.