Recent salaries shared by Senior Software Engineer at ASML
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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ASML pay FAQs
- The average salary for Senior Software Engineer is $207,189 per year (estimate) in US, which is 13% higher than the average ASML salary of $183,843 per year (estimate) for this job.
- ASML employees working as Senior Software Engineer in US have attributed a compensation and benefits rating of 2.3 out of 5 stars, based on 34 ratings. This is 32% lower than the average of Senior Software Engineer professionals at ASML worldwide.
- The salary trajectory of a Senior Software Engineer ranges between locations and employers. The salary starts at $152,818 per year (estimate) and goes up to $384,602 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Senior Software Engineer at ASML is $207,189 per year or $100 per hour, but some professionals have reported earning up to roughly $322,560 per year (90th percentile). The typical pay range is between $166,138 (25th percentile) and $262,664 (75th percentile) annually. This is based on 74 salaries submitted by ASML Senior Software Engineer professionals on Glassdoor, as of Jun 2026.
- Senior Software Engineer professionals typically earn between $80 and $126 per hour.
- Senior Software Engineer professionals typically earn between $13,845 and $21,889 monthly.