ASML employees working as Software Engineer 3 in US have attributed a compensation and benefits rating of 2.6 out of 5 stars, based on 2 ratings. This is in line with the average of Software Engineer 3 professionals at ASML worldwide.
The salary trajectory of a Software Engineer 3 ranges between locations and employers. The salary starts at $152,803 per year (estimate) and goes up to $384,599 per year (estimate) for the highest level of seniority.
The estimated average salary for a Software Engineer 3 at ASML is $168,040 per year or $81 per hour, but some professionals have reported earning up to roughly $229,101 per year (90th percentile). The typical pay range is between $144,806 (25th percentile) and $198,033 (75th percentile) annually. This is based on 45 salaries submitted by ASML Software Engineer 3 professionals on Glassdoor, as of Jun 2026.
Software Engineer 3 professionals typically earn between $70 and $95 per hour.
Software Engineer 3 professionals typically earn between $12,067 and $16,503 monthly.