ASML employees working as Systems Integration Engineer in US have attributed a compensation and benefits rating of 4.9 out of 5 stars, based on 4 ratings. This is 11% higher than the average of Systems Integration Engineer professionals at ASML worldwide.
The salary trajectory of a Systems Integration Engineer ranges between locations and employers. The salary starts at $131,588 per year (estimate) and goes up to $269,322 per year (estimate) for the highest level of seniority.
The estimated average salary for a Systems Integration Engineer at ASML is $145,440 per year or $70 per hour, but some professionals have reported earning up to roughly $222,779 per year (90th percentile). The typical pay range is between $117,132 (25th percentile) and $182,539 (75th percentile) annually. This is based on 14 salaries submitted by ASML Systems Integration Engineer professionals on Glassdoor, as of Jun 2026.
Systems Integration Engineer professionals typically earn between $56 and $88 per hour.
Systems Integration Engineer professionals typically earn between $9,761 and $15,212 monthly.