The salary trajectory of a Technical Program Manager ranges between locations and employers. The salary starts at $142,697 per year (estimate) and goes up to $243,288 per year (estimate) for the highest level of seniority.
The estimated average salary for a Technical Program Manager at Onto Innovation is $161,821 per year or $78 per hour, but some professionals have reported earning up to roughly $248,861 per year (90th percentile). The typical pay range is between $130,316 (25th percentile) and $203,653 (75th percentile) annually. This is based on 3 salaries submitted by Onto Innovation Technical Program Manager professionals on Glassdoor, as of Jun 2026.
Technical Program Manager professionals typically earn between $63 and $98 per hour.
Technical Program Manager professionals typically earn between $10,860 and $16,971 monthly.